Invited, Plenary Lectures, Workshop and Short Courses Instructor

1.           I. Petrov, “Microstructure of HiPIMS Coatings,”  57th IUVSTA workshop on HiPIMS, Université de Mons-Hainaut, Belgium, November 12-15, 2008.

2.           (Plenary) I. Petrov,  “Control of Micro- and Nanostructure in Transition Metal Nitrides Plasma Surface Engineering,” PSE 2008, Garmisch-Partenkirchen, Germany, September 15-19, 2008.

3.       I. Petrov, “Atomistic Processes during Synthesis of Hard Coatings Revealed by STM and LEEM,” 5th Symposium on Functional Coatings and Surface Engineering, Montreal, Canada, June 1-4, 2008.

4.       Instructor and Chair, Advanced Materials Characterization Workshop, FS-MRL, University of Illinois, June 11-12, 2008.

5.           Short course on Materials Characterization for Coatings and Thin Films, ICMCTF, San Diego, April 2008.

6.           I. Petrov, “Control of Microstructure during Reactive Sputter Deposition,” The Symposium on Reactive Sputter Deposition, Leoben University, Austria, December 6-7, 2007.

7.           I. Petrov, “Atomistic Processes during Energetic Deposition and Etching Studied by LEEM and STM,” International AVS Symposium, Seattle, WA, October 14-19, 2007.

8.           I. Petrov, “Control of Micro- and Nanostructure in Hard Coatings,” 14th International Conference on Vacuum, Electron, and Ion Technology, Varna, Bulgaria, September, 2007.

9.           I. Petrov, “Interface Microstructure Engineering by High Power Impulse Magnetron Sputtering for the Enhancement of Adhesion,” International Surface Engineering Workshop, Eighth Sheffield ABS Days, Sheffield, United Kingdom, July 23-24, 2007.

10.       Instructor, Materials Characterization for Nanotechnology Workshop, Nano-CEMMS Center, University of Illinois, May 2007.

11.       Instructor and Chair, Advanced Materials Characterization Workshop, May 23, FS-MRL, University of Illinois, 2007.

12.       I. Petrov, “Control of Micro- and Nanostructure in Transition Metal Nitrides,” International Conference on Metallurgical Coatings and Thin Films,  San Diego, April 2007.

13.       Short course on Materials Characterization for Coatings and Thin Films, ICMCTF, San Diego, April 2007

14.       I. Petrov, “Advances in Materials Nanocharacterization,” Caterpillar, Peoria Illinois, April 20, 2006

15.       I. Petrov, “Fundamentals of Thin Film Growth,” Linköping University, Sweden, February 16, 2005.

16.        I. Petrov, “Advances in Materials Nanocharacterization,” 14th international conference on Vacuum, Electron, and Ion Technology, Bulgaria, September, 2005.

17.       Short course on Fundamental of Sputter-Deposition, FS-MRL, University of Illinois.

18.       I. Petrov, “Advances in Materials Nanocharacterization,” Physics Department Seminar, University of Toledo, November 17, 2005.

19.       I. Petrov, “Advances in Materials Nanocharacterization,” Mechanical and Industrial Engineering, University of Illinois, November 29, 2005.

20.       (Plenary) I. Petrov, “Control of Microstructural and Nanostructural Evolution during Film Growth,” Mikkeli International Industrial Coating Seminar MIICS-2004, Finland, March 18-20, 2004.

21.       NSF workshop instructor on Surface Engineering at Northwestern University, May 2004

22.       I. Petrov, “Seeing Atoms: Bringing Modern Analytical Techniques in the Classroom,” Illinois Association of Chemistry Teachers Conference IACT 2004, Illinois State University, Normal, Illinois, October 8, 2004.

23.       (Plenary) I. Petrov, “Control of Nanostructure Evolution in Metastable Transition Metal Nitride Layers using High-flux, Low-energy Ion Irradiation during Growth,” George W. Keulks Symposium on Nanotechnology, University of Wisconsin – Milwaukee, October 15, 2004.

24.       I. Petrov, “Control of Nanostructure Evolution in Metastable Transition Metal Nitride Layers Using High-flux, Low-energy Ion Irradiation during Growth,” 51th AVS International Symposium, Anaheim,  Nov.14, 2004.

25.       I. Petrov, “Novel, Self-assembled Nanostructures in Metastable Transition-metal Nitride Layers Formed under High-flux, Low-energy Ion Irradiation during Growth,” 13th International Conference on Vacuum, Electron, and Ion Technology, Bulgaria, September, 2003.

26.       (Plenary) I. Petrov, “Advances in Materials Nanocharacterization,” European Nationals Science Foundation Workshop, Sofia, Bulgaria, Sept. 22-24, 2003.

27.       “Control of Microstructure Evolution during Film Growth,” 50th AVS International Symposium, Baltimore, Nov.2, 2003.

28.       D. Gall, C.-S. Shin, S. Kodambaka, M.A. Wall, I. Petrov, and J.E. Greene, "Atomic-Scale Surface Processes Controlling the Growth of Cubic Transition-Metal Nitrides: TiN, CrN, ScN, TaN," International Conference on Metallurgical Coatings and Thin Films, San Diego, May, 2002.

29.       Joe Greene and I. Petrov, "Microstructural and Surface Morphological Evolution at the Atomic Scale during Sputter Deposition of TiN: a HR-TEM, XRD, STM, and Modeling Study," Asia Pacific Conference on Plasma Science and Technology, Cheju, Korea, July, 2002.

30.       I. Petrov, “Growth, Microstructure, and Properties of Metastable Transition-metal Nitrides:
ä-TaNx, Ti1-xCexN, Ti1-xYxN,”  International Surface Engineering Workshop, Eighth Sheffield ABS Days, July 23-24, 2002, Sheffield, United Kingdom.

31.       I. Petrov, “Development of Texture in Polycrystalline in Transition-Metal Nitride Layers Grown by Reactive Magnetron Sputtering: Role of Low-Energy Ion/Surface Interactions,” ISI2002 International Workshop on "Effect of ions in layer growth," Balatonvilágos (Lake Balaton), September 9-13 2002

32.       I. Petrov, “Novel, Self-assembled Nanostructures in Metastable Transition-metal Nitride Layers Formed under High-flux, Low-energy Ion Irradiation During Growth,” 36th  IUVSTA  Workshop on the Mechanisms of Formation and Applications of Hard Nanostructured Coatings, Plzen, Czech Republic, October 20-24, 2002.

33.       I. Petrov, “Fundamentals of Thin Film Growth,” Uppsala University, October 25, 2002.

34.       J.E. Greene and Ivan Petrov, "Microstructural and Surface Morphological Evolution at the Atomic Scale during the Growth of Polycrystalline TiN: a HR-TEM, XRD, STM, and Modeling Study," SungKyunKwan University, Kyunggi, Korea, May, 2001.

35.       S. Kodambaka, V. Petrova, W. Swiech, A. Vailionis, P. Desjardins, D.G. Cahill, I. Petrov, and J.E. Greene, "In-situ High-Temperature Scanning Tunneling Microscopy Studies of Early Stage Growth Kinetics of TiN Epitaxy," C.E.A.-Saclay, France, June 2001.

36.       S. Kodambaka, V. Petrova, W. Swiech, A. Vailionis, P. Desjardins, D.G. Cahill, I. Petrov, and J.E. Greene, "In-situ High-Temperature Scanning Tunneling Microscopy Studies of Early Stage Growth Kinetics of TiN Epitaxy," Forschungszentrum Jülich, Germany, June 2001.

37.       J.E. Greene and I. Petrov, "In-situ STM and LEEM Studies of TiN(001) and TiN(111) Growth Kinetics," Asian Materials Research Conference, Singapore, July, 2001.

38.       J.E. Greene and I. Petrov, "In-situ STM and LEEM Studies of TiN(001) and TiN(111) Growth Kinetics," 21st Annual Mexican Surface Science and Vacuum Society Conference, Mazatlan, Mexico, September, 2001.

39.       I. Petrov, C.-S. Shin, D. Gall, S. Kodambaka, and J. E. Greene, "Epitaxial Growth and Properties of Transition Metal Nitrides," Mikkeli International Industrial Coating Seminar, Finland, March 16-18, 2000.

40.       (Plenary) I. Petrov, "Microstructure Development in Thin Hard Coatings," Mikkeli International Industrial Coating Seminar, Finland, March 16-18, 2000.

41.       J. E. Greene, S. Kodambaka, P. Desjardins, A. Vailionis, V. Petrova, I. Petrov and D. Cahill, "Microstructural and Surface Morphological Evolution at the Atomic Scale during the Growth of Polycrystalline TiN: a HR-TEM, XRD, STM, and Modeling Study," US-Japan Workshop on Mesoscopic Phenomena on Surfaces, Park City, Utah, April 2000.

42.       R. Hull, D. N. Dunn, M. J. Williamson, F. M. Ross, M. Reuter, R. M. Tromp, S. K. Kodambaka, I. Petrov, and J. E. Greene, "New Techniques for Detailed Measurment and Fundamental Understanding of Polycrystalline Thin Films," Materials Research Society, San Francisco, CA, April, 2000.

43.       I. Petrov, C.-S. Shin, D. Gall, S. Kodambaka, and J. E. Greene, "Growth and Properties of Epitaxial Transition Metal Nitrides: CrN, TaN and ScN," International Surface Engineering Workshop, Sixth Sheffield ABS Days, Sheffield, United Kingdom, July 25-26, 2000.

44.       J. E. Greene, and I. Petrov, “Microstructural and Surface Morphological Evolution at the Atomic Scale during the Growth of Polycrystalline TiN: a HR-TEM, XRD, STM, and Modeling Study,” Materials Research Society, Boston, MA, November, 2000.

45.       Ivan Petrov, S. Kodambaka, P. Desjardins, A. Vailionis, V. Petrova, D. Cahill and J. E. Greene, "Microstructural and Surface Morphological Evolution at the Atomic Scale during the Growth of Polycrystalline TiN: a HR-TEM, XRD, STM, and Modeling Study," IUVSTA Workshop on Selective and Functional Film Deposition Technologies as Applied to ULSI Technology, Mie, Japan, November 19-24, 2000.

46.       J.E. Greene and I. Petrov, "Microstructural and Surface Morphological Evolution at the Atomic Scale during the Growth of Polycrystalline TiN: a HR-TEM, XRD, STM, and Modeling Study," 8th International Conference on Plasma Surface Engineering, Garmisch, Germany, September, 2000.

47.       J.E. Greene and I. Petrov, "Microstructural and Surface Morphological Evolution at the Atomic Scale during the Growth of Polycrystalline TiN: a HR-TEM, XRD, STM, and Modeling Study," International Conference on Coatings on Glass, Maastricht, Netherlands, October, 2000.

48.       J.E. Greene and I. Petrov, "Microstructural and Surface Morphological Evolution at the Atomic Scale during the Growth of Polycrystalline TiN: a HR-TEM, XRD, STM, and Modeling Study," International Conference on Materials and Technology, Portoroz, Slovenia, October, 2000.

49.       J.E. Greene, "Microstructural and Surface Morphological Evolution at the Atomic Scale during the Growth of Polycrystalline TiN: a HR-TEM, XRD, STM, and Modeling Study," Materials Research Society, Boston, November, 2000.

50.       I. Petrov, "Thin Films and Surface Science at the DOE Electron-Beam Microcharacterization Centers," U.S. Department of Energy Workshop, Washington DC, August 13, 1999.

51.       I. Petrov,"Variable Temperature Scanning Tunneling Microscopy Studies on TiN(001) Surface Diffusion Processes," International Surface Engineering Workshop, Fifth Sheffield ABS Days, Sheffield, United Kingdom, July, 1999.

52.       I. Petrov, "Epitaxial Growth and Properties of Transition Metal Nitrides: ScN, CrN AND TaN," 11th IUVSTA International Conference on Thin Films, Cancun, México, August 30- September 3, 1999.

53.       (Plenary) I. Petrov, 11th International School on Vacuum, Electron, and Ion Technology, Varna, Bulgaria, September 20-25, 1999.

54.       I. Petrov, “Microstructural and Surface Morphological Evolution at the Atomic Scale during the Growth of Polycrystalline TiN: a TEM, XRD, HT-STM, and Modeling Study”, 46th AVS International Symposium, Seattle, WA, October 25-29, 1999.

55.       I. Petrov, "Microstructural and Surface Morphological Evolution during Growth of Transition-metal Nitrides: Role of Low-Energy Ion/Surface Interactions," Department of Physics, Linköping University, Sweden, November 19, 1998.

56.       I. Petrov, "Fundamental of Thin Film Growth by Sputter Deposition," Kobe Electronics Materials Center of North Carolina, Raleigh, North Carolina, Feb. 26-27, 1997.

57.       I. Petrov and J. E. Greene, "Low-Energy Ion/Surface Interactions During Metal and Diffusion-Barrier Film Growth: Effects on Nucleation, Microchemistry, Microstructure Evolution, and Texture," Materials Research Society, San Francisco, California, April, 1997.

58.       I. Petrov and J. E. Greene, "Low-Temperature Epitaxial Growth of Semiconductors and Ceramics," American Chemical Society, San Francisco, California, April, 1997.

59.       I. Petrov and J. E. Greene, "Atomic-Level Control of Surface Reaction Pathways During Film Growth Under Highly Kinetically Constrained Conditions: Materials Processing Strategies to Meet Future SIA Needs," International Conference on Metallurgical Coatings and Thin Films, San Diego, California, April, 1997.

60.       I. Petrov, "Epitaxial Growth of Transition Metal Nitrides on Metal-Ion Etched Ferritic and Austenitic Steel Substrates," International Surface Engineering Workshop, Third Sheffield ABS Days, Sheffield, United Kingdom, July, 1997.

61.       I. Petrov, "Microstructure and Texture Evolution During Transition Metal Nitride Growth" National Research Institute for Metals, Tsukuba 305 Japan, July 7-15, 1997.

62.       I. Petrov, "Al/TiN and Al/TiW Metal/Diffusion Barrier Systems: Interfacial Reaction Paths and Kinetics" National Research Institute for Metals, Tsukuba 305 Japan, July 7-15, 1997.

63.       (Plenary) I. Petrov, Microstructure and Texture Evolution during Sputter Deposition" XVII Congress of the Mexican Society of Surface Science and Vacuum, Mazatlan, Mexico, Sept. 1-4, 1997.

64.       (Plenary) I. Petrov, Overview of Ion-Assisted Thin Film Deposition", Thin Film Workshop, Vatsdena, Sweden, December 15, 1997.

65.       I. Petrov, "Microstructural Evolution, Defect Structure, and Development of Preferred Orientation during Growth of Transition-Metal Nitride Films," 24th Annual Symposium on Applied Vacuum Science and Technology, Orlando, Florida, March 11-14, 1996.

66.       I. Petrov, "Microstructure of Interfaces and Multilayer Coatings Prepared by Combined Arc/Magnetron Deposition Techniques," International Conference on Metallurgical Coatings and Thin Films, San Diego, California, April 1996.

67.       I. Petrov, "Microstructural and Microchemical Studies of Model Diffusion Barrier Systems: Interfacial Metal/Barrier Reaction Paths," SRC Workshop on Cu Interconnects, Rensselaer Polytechnic Institute, Troy, New York, June 1996.

68.       I. Petrov, "Microstrustructure and Microchemistry of PVD Interfaces," International Surface Engineering Workshop, Second Sheffield ABS Days, United Kingdom, July 23-24, 1996.

69.       I. Petrov, "Fundamentals of Transition Metal Nitride Crystal Growth," 10th IUVSTA International Conference on Thin Films and 5th European Vacuum Conference, Salamanca, Spain, Sept, 1996.

70.       I. Petrov, "Fundamentals of Sputter Deposition," Microelectronic Center of North Carolina, Raleigh, North Carolina, September 1996.

71.       (Plenary) I. Petrov, "Low-Temperature Growth of Transition Metal Nitrides: Effects of Ion Energy and Flux", 10th International Conference on Vacuum Web Coating, Fort Lauderdale, Florida,  November 10-12, 1996.

72.       I. Petrov, "Microstructure Of Engineered Interfaces And Multlayered Films Using Combined Arc/Magnetron Sputter Deposition Processes," International Surface Engineering Workshop, First Sheffield ABS Days, Sheffield, United Kingdom, March 28-30, 1995.

73.       I. Petrov, “The Deposition of AlCu and TiN Films for Microelectronic Applications Using Ionized Magnetron Sputter Deposition," American Vacuum Society 41st National Symposium, Denver, Colorado, October, 1994.

74.       I. Petrov, "Nb-Containing (Ti,Al)N Coatings Grown by a Combined Unbalanced- Magnetron/Cathodic-Arc Deposition Method," International Conf. Metallurigical Coatings and Thin Films, San Diego, California, April 1994.

75.       I. Petrov, “Development of Preferred Orientation During Ion-Assisted Growth," IUVSTA Workshop on Low-Energy Ion/Surface Interactions during Thin Film Growth, Kitzsteinhorn, Austria, May 16-22, 1993

76.       I. Petrov, "Magnetron Sputter-Deposition of Diamond-like Carbon," The Gillette Company, Boston, Massachusetts, March 27, 1992.